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Application and performance requirements of titanium targets

Update:2022-09-22
Abstract:Titanium targets are mainly used in the electronics and information industries, such as integrated c...
Titanium targets are mainly used in the electronics and information industries, such as integrated circuits, flat-panel displays and decorative coatings in the home decoration and automotive industry, such as glass decorative coatings and wheel decorative coatings. The requirements for Ti targets in different industries are also very different, including: In terms of purity, microstructure, welding performance, and dimensional accuracy, the specific requirements are as follows:
1. Purity: for non-integrated circuits: 99.9%; for integrated circuits: 99.995%, 99.99%.
2. Microstructure: for non-integrated circuits: the average grain size is less than 100μm; for integrated circuits: the average grain size is less than 30μm, and the average grain size for ultra-fine grains is less than 10μm.
3. Welding performance: For non-integrated circuits: brazing, monolithic; For integrated circuits: monolithic, brazing, diffusion welding.
4. Dimensional accuracy: for non-integrated circuits: 0.1mm; for non-integrated circuits: 0.01mm.